Facility

UHV long-throw sputter system (ULVAC TECHNO / Pascal)

L/UL station (w/ iLA system) + Oxide film depo. station (w/ One DC/RF helicon/magnetron Cathode, Dry Etch. system) + Metal co-depo. station (w/ Six DC/RF helicon/magnetron Cathodes )

High speed magnetron co-sputter system (ULVAC TECHNO)

Three DC/RF Cathodes

UHV sputter coater (ULVAC TECHNO)

RF magnetron Cathode (w/ Dry Etch. system)

High Magnetic Field Super Conductor Magnet 12T-SCM (JASTEC)

12T SCM-VSM (Riken Denshi drive unit & HAYAMA sensor coil & Home made unit) / Combinatorial electric furnace / Multi sample magnetometer (MSM - inductive method)

DSC (SETARAM DSC111)

Differential scanning calorimetry (from ambient to 830°C, from -120°C to 200°C (w/ cooling accessory ) )

Magneto-optical Effect Measurement and Observation system (NEOARK CORPORATION)

Magnetic domain Microscope (in-plane and out of plane) & Kerr loop measurement system (w/ electromagnet up to 1.5 T, out of plane direction)

AFM (Hitachi HighTech corp. SPI3800 & SPA400)

Scanning probe microscope (w/ DFM, MFM modes)

Electromagnet -VSM (Riken Denshi system & Home made)

Vibrating sample magnetometer for hard magnetics materials (H = 1.5 T) and soft magnetics materials (H = 0.2 T) units

miscellaneous

Diamond disc cutter, polisher (rotor and slide type), heater, Ceramic wire cutter, Sandblaster

Yamagata University Faculty of Engineering / Joint Instrumental Analysis Centre

XRD w/ XRR, thin film, In-plane (RIGAKU; SMARTLAB )

XRD w/ XRR, thin film (RIGAKU; ULTIMA IV )

FE-SEM w/ EDS, EBSD (JEOL; JSM-7600FA )